Interconnect structures for stacked dies, including penetrating structures for through-silicon vias, and associated systems and methods

ABSTRACT

Interconnect structures for stacked dies, including penetrating structures for through-silicon vias, and associated systems and methods are disclosed. A system in accordance with a particular embodiment includes a first semiconductor substrate having a first substrate material, and a penetrating structure carried by the first semiconductor substrate. The system further includes a second semiconductor substrate having a second substrate material with a preformed recess. The penetrating structure of the first semiconductor substrate is received in the recess of the second semiconductor substrate and is mechanically engaged with the recess and secured to the second semiconductor substrate.

CROSS-REFERENCE TO RELATED APPLICATIONS

This application is a divisional of U.S. patent application Ser. No.13/007,002 filed Jan. 14, 2011, now U.S. Pat. No. 8,435,836, which is adivisional of U.S. patent application Ser. No. 12/209,029 filed Sep. 11,2008, now U.S. Pat. No. 7,872,332, each of which is incorporated hereinby reference in its entirety.

TECHNICAL FIELD

The present disclosure is directed generally to interconnect structuresfor stacked dies including penetrating structures for through-siliconvias, and associated systems and methods.

BACKGROUND

Packaged semiconductor dies, including memory chips, microprocessorchips, and imager chips, typically include a semiconductor die mountedto a substrate and encased in a plastic protective covering. The dieincludes functional features, such as memory cells, processor circuits,imager devices, and interconnecting circuitry. The die also typicallyincludes bond pads electrically coupled to the functional features. Thebond pads are electrically connected to pins or other types of terminalsthat extend outside the protective covering for connecting the die tobusses, circuits, and/or other microelectronic assemblies.

Market pressures continually drive manufacturers to reduce the size ofsemiconductor die packages and to increase the functional capacity ofsuch packages. One approach for achieving these results is to stackmultiple semiconductor dies in a single package. The dies in such apackage are typically interconnected by electrically coupling the bondpads of one die in the package with bond pads of other die(s) in thepackage.

A variety of approaches have been used to electrically interconnect thedies within a multi-die package. One existing approach is to use solderballs connected directly between the bond pads of neighboring dies.Another approach is to fuse “bumps” on the bond pads of neighboringdies. However, the foregoing processes can suffer from severaldrawbacks. For example, in some cases, the connections between bond padsof neighboring dies may be incomplete and/or may fail under certainconditions. In addition, the temperature typically required to form thebonds between neighboring dies may consume a significant portion of thetotal thermal budget allotted to the package for processing.Accordingly, the bonding process can limit the life of the packageand/or the thermal budget available for other processing steps requiredto form the package. As a result, there remains a need for improvedtechniques for interconnecting dies within a semiconductor package.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a partially schematic, side cross-sectional view of a packageconfigured in accordance with an embodiment of the disclosure.

FIG. 2 is a partially schematic, side cross-sectional view of aninterconnection arrangement between two dies in accordance with anembodiment of the disclosure.

FIGS. 3A-3G schematically illustrate processes for forming projectionsin accordance with embodiments of the disclosure.

FIGS. 4A-4E schematically illustrate processes for forming recessesconfigured to receive a projection in accordance with embodiments of thedisclosure.

FIGS. 5A-5D schematically illustrate a process for forming a projectionhaving a generally arrowhead-shape in accordance with another embodimentof the disclosure.

FIGS. 6A-6B schematically illustrate a process for forming a projectionhaving protrusions and indentations in accordance with anotherembodiment of the disclosure.

FIG. 7 schematically illustrates a process for forming a projectionhaving dendritic structures in accordance with an embodiment of thedisclosure.

FIG. 8A-8B schematically illustrate a process for forming a projectionhaving protrusions and indentations in accordance with anotherembodiment of the disclosure.

FIGS. 9A-9E schematically illustrate a process for forming a recess inaccordance with further embodiments of the disclosure.

FIGS. 10A-10C schematically illustrate a process for forming a recess inaccordance with still further embodiments of the disclosure.

FIGS. 11A-11C illustrate a process for connecting semiconductorsubstrates in accordance with another embodiment of the disclosure.

FIG. 12 is a schematic illustration of a system that can include one ormore packages configured in accordance with several embodiments of thedisclosure.

DETAILED DESCRIPTION

Several embodiments of the present disclosure are described below withreference to packaged semiconductor devices and assemblies, and methodsfor forming packaged semiconductor devices and assemblies. Many detailsof certain embodiments are described below with reference tosemiconductor dies. The term “semiconductor die” is used throughout toinclude a variety of articles of manufacture, including, for example,individual integrated circuit dies, imager dies, sensor dies, and/ordies having other semiconductor features. Many specific details ofcertain embodiments are set forth in FIGS. 1-12 and the following textto provide a thorough understanding of these embodiments. Several otherembodiments can have configurations, components, and/or processesdifferent than those described in this disclosure. A person skilled inthe relevant art, therefore, will appreciate that additional embodimentsmay be practiced without several of the details and/or features of theembodiments shown in FIGS. 1-12, and/or with additional details and/orfeatures.

FIG. 1 is a partially schematic, side cross-sectional view of asemiconductor system 160 that includes a semiconductor package 100configured in accordance with an embodiment of the disclosure. Thepackage 100 can include a support member 101 that carries multiplesemiconductor substrates (e.g., semiconductor dies) that areinterconnected electrically and mechanically with each other. Forexample, the support member 101 can carry a first semiconductorsubstrate 110, a second semiconductor substrate 130 stacked on the firstsemiconductor substrate 110, and a third semiconductor substrate 150stacked on the second semiconductor substrate 130. Each of thesemiconductor substrates can include one or more connectors forconnecting the substrate to a neighboring substrate. For example, thefirst substrate 110 can include first connectors 111 that face towardthe second substrate 130. The second substrate 130 can include secondconnectors 131 that face toward the first substrate 110 and connect withthe corresponding first connectors 111. The second substrate 130 canalso include its own first connectors 111 that connect withcorresponding second connectors 131 of the third substrate 150.

Each of the semiconductor substrates can include features thatfacilitate electrical signal communication within the substrate. Forexample, the connectors 111, 131 can communicate with other features inthe semiconductor substrates through one or more vias. The firstsemiconductor substrate 110 can accordingly include a first via 112, andthe second semiconductor substrate 130 can include a second via 132. Thevias 112, 132 in particular embodiments can include through-silicon vias(TSVs) or other vias that extend entirely through the correspondingsubstrate material to facilitate interconnections with stacked dies.

The package 100 can include additional features for providingcommunication with elements outside the package, and for providingcommunication between or among the substrates within the package. Forexample, the support member 101 can include package connectors 103(e.g., solder balls) that facilitate connecting the package 100 tocircuit boards or other external devices. The support member 101 canalso include support member connectors that connect the support member101 with the semiconductor substrates 110, 130 and 150. For example,these connections can be provided by first support member connectors 102a (e.g., wire bonds) and/or second support member connectors 102 b(e.g., solder balls). The entire package 100 can be surrounded by anencapsulant 105 that protects the inner features of the package 100,including the interconnections between neighboring semiconductorsubstrates. The following discussion describes additional features ofthese interconnections.

FIG. 2 is an enlarged, partially schematic illustration of an interfaceregion between the first substrate 110 and the second substrate 130,configured in accordance with a representative embodiment of thedisclosure. The first substrate 110 is positioned proximate to thesecond substrate 130 such that the first via 112 and the second via 132are aligned along a common via axis V. The first substrate 110 includesa first connector 111 and the second substrate 130 includes a secondconnector 131, both of which are also aligned along the via axis V. Thefirst connector 111 includes a penetrating structure 114, and the secondconnector 131 includes a recess 134 configured to receive thepenetrating structure 114. The recess 134 can be pre-formed; e.g., itcan be formed in whole or in part before the penetrating structure 114is received in it. Both the first connector 111 and the second connector131 include conductive materials which may in turn include one or moreconductive constituents. For example, the first connector 111 caninclude a first conductive material 113 that in turn includes a basematerial 115 and a conductive layer 116, e.g., a coating or cladding.The second connector 131 can include a second conductive material 133that in turn includes a base material 135 and a conductive layer orcoating 136. As will be discussed in further detail later, the basematerials 115, 135 for each of the corresponding connectors 111, 131 canbe selected for structural and electrical properties, and the coatings116, 136 for each of the corresponding connectors 111, 131 can beselected to facilitate, enhance, and/or protect the connection betweenthe two connectors.

In operation, the first and second semiconductor substrates 110, 130 canbe connected by moving one both of the substrates toward the other alongthe via axis V, as indicated by arrows A, thus pressing the penetratingstructure 114 into the recess 134. The penetrating structure 114 can cutinto and/or deform the second conductive material 133 during thisprocess, to provide an enhanced mechanical and electrical engagementbetween the two connectors. In addition, the penetrating structure 114can include surfaces that have a component (and in many cases, asignificant component) projected into a plane parallel to the via axisV. Accordingly, when it is engaged with the recess 134, the penetratingstructure 114 can resist relative lateral movement between the firstsubstrate 110 and the second substrate 130 (indicated by arrow L). Thisin turn can result in an interconnection structure that is mechanicallyand electrically more robust than existing interconnection structures.Additional support and protection for the interconnection structures canbe provided by an adhesive 104 (e.g., a thin bond line adhesive)disposed on the first substrate 110 and/or the second substrate 130. Asthe first and second substrates 110, 130 are brought into contact witheach other, the adhesive 104 can provide an additional mechanicalconnection between the substrates, and can protect the interconnectionfrom exposure to oxidants and/or other undesirable elements. Theadhesive 104 can include any of a variety of suitable materials known tothose of ordinary skill in the relevant art. For example, the adhesive104 can include a pre-applied BCB or SU-8 adhesive, a liquid crystalpolymer, or a polymer-based Intervia™ adhesive, available from Rohm andHaas of Philadelphia, Pa. In other embodiments, the adhesive 104 can bean underfill material, applied after the first and second substrates110, 130 are joined.

In a particular embodiment, the coatings 116, 136 include tin. Prior toengaging the first and second substrates 110, 130 with each other, thecoatings 116, 136 can be fluorinated, e.g., by exposure to a sulfurhexafluoride plasma. The resulting fluorinate tin oxide forms a dry fluxwhich has favorable reflow characteristics, e.g., short reflow timeand/or low reflow temperatures.

In an embodiment shown in FIG. 2, the first substrate 110 includes onlyfirst connectors 111, and the second substrate 130 includes only secondconnectors 131. Accordingly, the first substrate 110 can be deliberatelymanufactured (e.g., at the wafer level) using steps dedicated to formingthe first connectors 111, and the second substrate 130 can be formed(e.g., at the wafer level) using steps dedicated to forming the secondconnectors 131. Each of the substrates 110, 130 can accordingly beprocessed with as few steps as are necessary to form the correspondingconnectors 111, 131. In other embodiments, the substrate may includeboth first connectors 111 and second connectors 131. For example, whenthe second substrate 130 is positioned between the first substrate 110and a third substrate 150 (as shown in FIG. 1), the second substrate 130can include second connectors 131 to connect with the first substrate110, and first connectors 111 to connect with the third substrate 150.Further details regarding the formation of both the first connectors 111and the second connectors 131 are described below.

FIGS. 3A-3D illustrate a representative process for forming a firstconnector 111 in accordance with an embodiment of the disclosure.Beginning with FIG. 3A, the first substrate 110 can include a firstsubstrate material 117 (e.g., silicon) having a first surface 142 a anda second surface 142 b facing away from the first surface 142 a. The via112 can extend entirely through the first substrate material 117 fromthe first surface 142 a to the second surface 142 b. The first substrate110 can further include a bond pad 118 (e.g., a conductive pad forelectrical and/or mechanical connections) at the first surface 142 a,which is connected with other structures and devices of the firstsubstrate 110 with one or more conductive lines 119. A dielectricmaterial 121 is disposed at the first surface 142 a to protect the firstsurface, and a plating buss 122 is disposed over the dielectric layer121 to facilitate formation of additional conductive structures byelectrolytic or other additive and/or subtractive processes. The platingbuss 122 can include a titanium/tungsten alloy or other suitableconductive and/or adhesive material to provide for electricalcommunication and/or adhesion. As shown in FIG. 3A, a first mask 120 ais positioned over the plating buss 122, and has an aperture 170 alignedwith the via 112. In a representative embodiment, the first mask 120 aincludes a wet or dry thick film photoresist material, having athickness of up to about 40 microns, and in a particular embodiment,approximately 15-20 microns. The aperture 170 can have a lateraldimension (e.g., a diameter) of about 10-20 microns, and can have around, square or other suitable cross-sectional shape.

In FIG. 3B, the base material 115 is disposed in the aperture 170 of thefirst mask 120 a, e.g., via an electrolytic process. The base material115 can include nickel, copper, or an alloy of nickel or copper inparticular embodiments. In other embodiments, the base material 115 canhave other compositions, e.g., gold or a gold alloy. A second mask 120 bis then positioned over the base material 115. The second mask 120 b caninclude a sacrificial protective layer, formed using under-bumpmetallurgy techniques. For example, the second mask 120 b can includepalladium or another sacrificial layer material applied in anelectroless or other process.

Referring next to FIG. 3C, the first mask 120 a (FIG. 3B) is thenremoved, and the base material 115 is etched (e.g., using a wet etchprocess) or otherwise partially removed to form a structure having agenerally triangular cross-sectional shape (e.g., a conical, pyramidal,or similar structure). For example, a sodium under-etch/over-etchprocess can be used to etch the base material 115. The presence of thesecond mask 120 b protects the upper surface of the base material 115 sothat the sides of the base material 115 are removed at a greater ratethan the top of the base material 115. As the etching process proceeds,the second mask 120 b eventually lifts off the base material 115 orotherwise dissipates. The portions of the plating buss 122 located awayfrom the base material 115 are also removed, either via the same processas is used to remove the base material 115, or via a different,subsequent process.

FIG. 3D illustrates the first substrate 110 after the etching process ofthe base material 115 has been completed, and a conductive coating 116has been applied to the base material 115. In a particular embodiment,the conductive coating 116 can include tin or a tin alloy, and in otherembodiments, the conductive coating 116 can have other compositions. Tinor a tin alloy can be particularly suitable in many instances becausethese materials reflow at relatively low temperatures, and canaccordingly facilitate electrical and mechanical bonding withoutrequiring a high temperature process. When the base material 115includes copper or a copper alloy, the conductive coating 116 can beapplied using an electroless immersion plating process or anotherprocess, e.g., sputtering or an electrolytic/masking process. Forexample, in other embodiments, a buss layer and patterned photoresistlayer can be used to apply the conductive coating 116 via anelectrolytic process. The conductive coating 116 can include materialsother than tin or tin alloys, for example, gold. In still furtherembodiments, the conductive coating 116 can be eliminated. For example,when the base material 115 includes gold, it can be bonded directly togold in a corresponding recess 134 (FIG. 2) of a second substrate 130(FIG. 2), without the need for the conductive coating 116. Such abonding process can be conducted at a temperature of up to 150° C. Inparticular embodiments, ultrasonic energy can be used to facilitatebonding, e.g., to reduce the mechanical force used to place and/or pressthe parts in contact with each other. In any of these embodiments, anexternal surface 129 of the resulting penetrating structure 114 can havea generally tapered shape that facilitates penetrating into thecorresponding recess 134 of the second substrate 130. This shape, aloneor in combination with the application of ultrasonic energy, canfacilitate “scrubbing” the mating surfaces to remove contaminants andfurther facilitate the bond between the penetrating structure 114 andthe recess 134.

FIG. 3E is a schematic illustration of the first substrate 110undergoing a process for forming a penetrating structure in accordancewith another embodiment of the disclosure. In this embodiment, theconductive material 115 is applied uniformly (e.g., as a blanket layer),without the use of the first mask 120 a described above with referenceto FIG. 3A. The second mask 120 b is applied to the base material 115 inalignment with the via 112. The base material 115 is then etched, withthe second mask 120 b providing protection of the base material 115 overthe via 112, to produce the shape shown in FIG. 3F. The resultingpenetrating structure 114 can then be coated with a conductive coating116 in a manner generally similar to that described above with referenceto FIG. 3D.

FIG. 3G illustrates another process by which the penetrating structure114 can be formed. In this process, the first mask 120 a is formed sothat the base material 115 is applied directly over the via 112, withthe second mask 120 b providing protection in a manner generally similarto that described above. The first substrate 110 is then exposed to anetchant that etches both the first mask 120 a and the base material 115,but not the second mask 120 b. Accordingly, the upwardly facing surfaceof the first substrate 110 assumes successively changing shapes, asindicated by dashed lines and arrows E in FIG. 3G. At the end of theetching process, a generally triangular penetrating structure 114 isformed, and the second mask 120 b lifts off or otherwise dissipates.Optionally, residual material from the first mask 120 a can then beselectively removed without affecting the shape of the conductive basematerial 115. A conductive coating can then be added to the basematerial 115, and the portions of the plating buss 122 located away fromthe base material 115 can then be removed in a manner generally similarto that discussed above. In one embodiment, the foregoing method ofremoving both the first mask 120 a and the base material 115 can beaccomplished by exposing the first substrate 110 a multi-functionremoval agent, e.g., a mixture of a solvent (which can preferentiallyremove the first mask 120 a) and an oxide/acid etchant (which canpreferentially remove the base metal 115). In other embodiments, thefirst substrate 110 can be transferred back and forth between a solventand an oxide/acid etchant to accomplish the same or a similar result.

FIGS. 4A-4B illustrate a representative process for forming the recess134 in the second substrate 130 in accordance with an embodiment of thedisclosure. Beginning with FIG. 4A, the second substrate 130 can includea second substrate material 137 (e.g., silicon) having a first surface142 a, a second surface 142 b, and a second via 132 that extends fromthe first surface 142 a to the second surface 142 b (e.g., athrough-silicon via). The via 132 can extend through a bond pad 138 atthe first surface 142 a, and can have a diameter in the range of about10-20 microns. The walls of the via 132 can be protected with adielectric layer and/or a barrier layer 146. Optionally, a seed layermay be disposed in the second via 132 to facilitate subsequent metalformation processes.

The base material 135 can be disposed in the second via 132 using any ofa variety of suitable processes, including vapor deposition processes(physical or chemical) and/or electrolytic or electroless depositionprocesses. The base material 135 can include copper in a particularembodiment. In other embodiments, e.g., when the penetrating structurereceived in the recess 134 includes uncoated gold, the base material 135can also include gold. In a particular arrangement of an embodimentshown in FIG. 4A, the base material 135 may tend to “bread loaf,” e.g.,close off or pinch off the entrance opening of the second via 132. Whilethis effect is typically undesirable when filling a via in mostsemiconductor processing applications, in a particular embodiment of thepresent disclosure, this effect can produce desirable results. Inparticular, this effect can produce a recess 134 having a depth Dgreater than or equal to a corresponding width W, with lobes 145 orother structures that project inwardly to engage with and at leastresist the removal of a corresponding protrusion that is inserted intothe recess 134.

FIG. 4B is an enlarged illustration of a portion of the second substrate130 after a conductive coating 136 has been applied to the base material135. The conductive coating 136 on one of the lobes 145 can contact thecorresponding conductive coating 136 on the other lobe 145, effectivelyforming two separate portions of the recess 134. In other embodiments,the conductive coatings 136 on opposing lobes 145 can remain out ofcontact with each other so that the recess 134 is continuous. In eitherarrangement, as discussed above, the second conductive material 133(e.g., the base material 135 and the conductive coating 136) can form astructure that provides both a mechanical and electrical interconnectionwith a corresponding penetrating structure, such as the penetratingstructure 114 described above with reference to FIGS. 3A-3G.

FIG. 4C illustrates a representative second substrate 130 in which arecess 134 has been formed in accordance with another embodiment of thedisclosure. In this embodiment, the via 132 extends only part waybetween the first surface 142 a and the second surface 142 b of thesecond substrate 130. Accordingly, the via 132 can be a blind via. Therecess 134 can be formed in the blind via 132 using techniques generallysimilar to those described above with reference to FIGS. 4A-4B. Theresulting structure may be particularly suitable when the secondsubstrate 130 is the outermost substrate in a stack of substrates. Forexample, the second substrate 130 shown in FIG. 4C can be used as theoutermost or topmost third semiconductor substrate 150 shown in FIG. 1.One feature of this process is that additional connecting structureswhich would be formed if the second substrate 130 were in the middle ofa stack of substrates need not be formed using the process shown in FIG.4C.

FIGS. 4D and 4E illustrate still another process for forming a recess134 in accordance with a particular embodiment. Referring first to FIG.4D, a support material 148 is disposed within the via 132. The supportmaterial 148 can include a base material generally similar to the basematerial 135 described above, or it can include another material, notnecessarily a conductive material. The support material 148 can formlobes 145 which are sized so that when a coating or layer 136 is appliedto the support material 148, it does not completely close off the via132. This arrangement allows an etchant or other material removal agentto enter into the via 132 after the coating 136 has been applied. Theremoval agent is selected to preferentially remove the support material148 (e.g., without removing the coating 136). Accordingly, the supportmaterial 148 can be removed to the position indicated by dashed lines inFIG. 4D, or to other positions. In some embodiments, the supportmaterial 148 can be completely removed. In any of these embodiments, thecoating 136 can remain in position by virtue of its attachment to thebond pad 138 and optionally, by virtue of the support provided by anyremaining support material 148 in the via 132, while one or moreportions of the coating 136 are cantilevered into the recess 134. Thecoating or layer 136 can be conductive or non-conductive, depending uponwhether the recess is to be used to form a mechanical/electricalconnection, or mechanical connection. In either embodiment, the coating136 is a representative example of an engaging material that ispositioned to engage with a corresponding penetrating structure asdescribed below.

FIG. 4E is a partially schematic illustration of the second substrate130, looking approximately normal to the first surface 142 a. As shownin FIG. 4E, the coating 136 has been selectively etched or otherwisetreated to form conductive projections 180 that extend inwardly into therecess 134. Alternatively, the coating 136 need not undergo thismaterial removal process. In either embodiment, referring now to bothFIGS. 4D and 4E, portions of the coating 136 can form an inwardly angledstructure that facilitates the process of receiving the correspondingpenetrating structure, but resists motion of the penetrating structureout of the via 132. For example, the portions of the coating 136 can beangled radially and/or axially inwardly into the recess 134. In aparticular embodiment, the unsupported (e.g., cantilevered) ends of thecoating 136 projecting into the recess 134 can engage with anarrowhead-shaped penetrating structure to prevent or at least resistmotion of the penetrating structure out of the recess 134 once it hasentered the recess 134. Such a penetrating structure is described infurther detail below with reference to FIGS. 5A-5D.

FIGS. 5A-8B illustrate penetrating structures and correspondingformation methods in accordance with further embodiments of thedisclosure. FIG. 5A, for example, illustrates the first substrate 110having a first mask layer 120 a with a first aperture 170 a aligned withthe via axis V, and a second mask layer 120 b with a larger secondaperture 170 b, also aligned with the via axis V. In FIG. 5B, a basematerial 115 has been applied to the bond pad 118 of the first substrate110. A third mask 120 c is then positioned over the base material 115.

In FIG. 5C, the second mask layer 120 b has been removed, and the basematerial 115 has been etched or otherwise processed in a mannergenerally similar to that described above with reference to FIG. 3C.Accordingly, the base material 115 has been formed into a head 123having a generally triangular cross-sectional shape, and the third mask120 c, which protected the height of the head 123, has floated away orotherwise dissipated. The first mask layer 120 a protects a lowerportion of the base material 115, which forms a shaft 124.

In FIG. 5D, the first mask layer 120 a has been removed to expose theshaft 124, and the coating 116 has been applied to the base material115, forming a penetrating structure 514. An external surface 529 of thepenetrating structure 514 has a generally arrowhead-type,cross-sectional shape, and varies in a non-monotonic manner around theperiphery of the penetrating structure 514. Accordingly, the penetratingstructure 514 can both penetrate into the recess 134 described abovewith reference to FIGS. 2, 4A and 4B, and, by virtue of the head 123being larger than the shaft 124, can interlock with the conductivematerial in the recess 134 and resist forces that may tend to dislodgethe penetrating structure 114 from the recess 134. In addition, becauseportions of the external surface 529 are non-horizontal (e.g., have acomponent aligned with the via axis V), this arrangement can resistrelative lateral movement between the semiconductor substrates joinedwith the penetrating structure 514, as described above.

FIGS. 6A-6B illustrate a process for forming a penetrating structure inaccordance with another embodiment of the disclosure. Beginning withFIG. 6A, a mask 120 is applied to the first semiconductor substrate 110,and a base material 115 is applied to the plating buss 122 overlying thebond pad 118, which is exposed via an opening in the mask. Thedeposition rate of the base material 115 can be varied during the courseof the deposition process to produce alternating layers having differentgrain structures. For example, the alternating layers can include smallgrain layers 125 a having a relatively fine grain structure, and largegrain layers 125 b having a coarser grain structure. The grain structurecan be controlled by controlling the deposition rate (e.g., bycontrolling the current density) for each layer, e.g., thereby using arelatively slow deposition process to form the small grain layers 125 a,and using a more rapid deposition process to form the large grain layers125 b.

In FIG. 6B, the mask 120 has been removed and the base material 115 hasbeen exposed to an etchant. The large grain layers 125 b, due to thecoarse structure of the corresponding grains, are etched at a greaterrate than are the small grain layers 125 a. Accordingly, the resultingpenetrating structure 614 can include protrusions 126 alternating withindentations 127. A coating layer 116 can then be applied to the basematerial 115. The resulting external surface 629 changes in anon-monotonic manner and can thus facilitate an interlocking engagementwith the conductive material of a corresponding recess.

FIG. 7 is a partially schematic illustration of a first substrate 110having a penetrating structure 714 formed in accordance with anotherembodiment of the disclosure. The penetrating structure 714 can beformed by applying a mask 120 to the first substrate 110 and applyingthe base material 115 to the buss layer 122 overlying the bond pad 118to form a generally columnar structure. After forming the columnarstructure, dendritic structures 728 can be formed at the exposed endportion of the base material 115, and a coating layer (not shown in FIG.7) can be applied to the dendritic structures 728. The dendriticstructures 728 can be relatively small (e.g., on the order of onemicron) and can be formed using existing electrolytic processes, but atelevated current densities compared with those used for typical fillprocesses. For example, the dendritic structures 728 can be formed usingcurrent densities of 50 amps per square foot or higher. As a result, theexternal surface 729 of the penetrating structure 714 varies in anon-monotonic manner, and includes indentations between neighboringdendritic structures 728, which can facilitate interlocking with theconductive material of a recess with which the penetrating structure 714is engaged.

In other embodiments, the dendrite structures 728 can be formed by othertechniques, and/or can have other shapes. For example, another techniquefor forming the dendritic structures 728 includes eliminating thelevelers (which are typically used to encourage an overall evendeposition process) during the formation of the penetrating structure714, e.g., toward the end of the deposition process. In another example,the dendritic structure 728 can be formed along the sides of thepenetrating structure 714, in addition to or in lieu of forming suchstructures at the end of the penetrating structure 714. This shape canbe achieved by continuing the dendritic growth process after the mask120 (or a portion of the mask 120) is removed, and can create apenetrating structure 714 with an enhanced ability to interlock with theconductive material of the recess into which the penetrating structure714 is inserted.

FIGS. 8A-8B illustrate yet another process for forming a penetratingstructure 814 in accordance with another embodiment of the disclosure.The base material 115 is applied to the bond pad 118 using a mask 120,as shown in FIG. 8A. In FIG. 8B, the mask 120 is removed, and the basematerial 115 is subjected to an etching process which results inmultiple protrusions 826 and indentations 827 at the end portion andside portions of the penetrating structure. Accordingly, these portionshave an irregular external surface 829, e.g., one that varies in anon-monotonic manner. The etchant used to form the indentations 827 canbe relatively aggressive, e.g., 40:2:1 (water:peroxide:hydrochloricacid). In other embodiments, the etchant can have other compositions. Acoating layer (not shown in FIG. 7) can be applied to the base material115 after the etching process is complete.

FIGS. 9A-9E illustrate a process for forming a recess that can receiveany of the foregoing penetrating structures described above. Beginningwith FIG. 9A, the process can include applying a fill material 139 to adielectric material 141 lining the via 132 of the second substrate 130.A first mask 140 a is then positioned on the second substrate 130, withan opening aligned with the via 131. In FIG. 9B, a portion of the fillmaterial 139 is removed, creating a depression 143 that extends beneaththe first surface 142 a of the second substrate material 137. In FIG.9C, a plating buss 144 has been applied to the second substrate 130, anda second mask 140 b has been positioned over the plating buss 144 andprocessed to form an opening aligned with the via axis V. In FIG. 9D,the base material 135 has been applied to the second substrate 130 andthe second mask 140 b has been removed. It is expected that thatpresence of the depression 143 will improve the structural integrity ofthe connection between the base material 135 and the fill material 139.

In FIG. 9E, the base material 135 has been etched or otherwise processedto form a recess 134. A coating 136 can be applied to the base material135 to facilitate interconnection with any of the foregoing penetratingstructures. Accordingly, the coating 136 can define an inner surface 947that bounds the recess 134. The inner surface 947 can have any of avariety of shapes, depending upon the shape of the correspondingpenetrating structure and/or other features. In a particular embodiment,the inner surface 947 can extend beneath the first surface 142 a of thesecond substrate material 137, but not into the fill material 139.Alternatively, the inner surface 947 can extend into the fill material139, as indicated in dashed lines as recess 134 c, or it can remainabove the second surface 142 a, as is also indicated in dashed lines asrecess 134 b. In still another embodiment, the recess 134 can be filledwith a conductive material, e.g., a silver paste or other conductivepaste that is applied to the second substrate 130 in a screen printingor other process. In any of these embodiments, the recess 134 canreceive, interlock with, and mechanically and electrically connect withthe corresponding penetrating structure.

FIGS. 10A-10C illustrate another process for forming a recess that canreceive any of the foregoing penetrating structures. FIG. 10Aillustrates the second substrate 130 after a fill material 139 (e.g.,copper) has been disposed in the via 132, and a mask 140 has beenpositioned over a portion of the fill material 139. In FIG. 10B, therecess 134 has been formed directly in the fill material 139, and inFIG. 10C, the conductive coating 136 has been applied to the walls ofthe recess 134. Accordingly, the fill material 139 and the coatingmaterial 136 can together form the second conductive material 133. Thecoating 136 can be applied using an immersion or other process. Afterthe coating 136 is applied, the mask 140 can be removed and the secondsubstrate 130 can be joined to the first substrate 110 (FIG. 2) usingany of the foregoing joining techniques.

One expected result of the process shown in FIGS. 10A-10C is that itdoes not require adding a conductive base material to the fill material.Conversely, a potential result of the process described above withreference to FIGS. 9A-9E is that it can produce larger (e.g., wider)recesses in a given via width, which can provide an additionally robustconnection with the corresponding penetrating structure.

One feature of several of the foregoing embodiments described above withreference to FIGS. 1-10C is that the stacked substrates can be joinedusing the combination of a receptacle or recess in one of thesubstrates, and a penetrating structure in the other. One expectedresult of this arrangement is that the features can be self-aligning.For example, the recess can have sloped entry surfaces and/or thepenetrating structure can have sloped external surfaces. These surfacescan be sloped at acute angles relative to the via axis. Accordingly, asthe two substrates are brought together, the penetrating structure andthe recess can accommodate some misalignment, for example, amisalignment of several microns.

Another feature of several of the foregoing embodiments described abovewith reference to FIGS. 1-10C is that the penetrating structure includesnon-horizontal surfaces that mate with corresponding non-horizontalsurfaces of the recess. An expected result of this arrangement is thatthe non-horizontal interface between the external surface of thepenetrating structure and the walls of the recess can resist lateralstresses and motion. In addition, the interlocking arrangement of thepenetrating structure and the recess (e.g., the support provided by therecess walls) can better withstand vertical forces that might causebuckling in other connection arrangements.

Still another feature of at least some of the foregoing embodiments isthat the interconnecting structures can be relatively small in size, andcan be spaced close together. For example, in a particular embodiment,the penetrating structure and the recess can be formed in/on vias havinga width of about 10 microns and a pitch of about 50 microns. In otherembodiments, these dimensions can be smaller. An expected result of thisarrangement is that it can reduce the overall size of the substrates andthe packages into which they are incorporated, thus enabling thepackages to be used in more compact applications.

Still another feature of at least several of the foregoing embodimentsis that the connection between the penetrating structure and the recesscan be achieved at relatively low temperatures and/or pressures. Forexample, when the penetrating structure and the recess include a tincladding, the corresponding substrates can be pressed together andelevated to a temperature above the eutectic temperature, e.g., about220° C. or less (and in a specific embodiment, about 217° C. forlead-free solder) to fuse the tin coatings. In embodiments in which thetin coating is eliminated and the penetrating structure and the recesseach have exposed gold surfaces, the process can be conducted at roomtemperature, with the interface between the penetrating structure andthe recess subjected to sonic energy (e.g., ultrasonic energy) tofacilitate bonding between these elements. This is unlike at least someexisting processes which typically require higher temperatures of up to350° C. for bonding. For example, typical copper-to-copper bondingprocesses require high temperatures of 350° C. or more and highpressures of 200 megapascals or more.

FIGS. 11A-11C schematically illustrate another process for formingrecesses and penetrating structures, and interconnecting the penetratingstructures with the recesses in a manner that can further reduce oreliminate the forces used to achieve a bond between stackedsemiconductor substrates. Beginning with FIG. 11A, penetratingstructures 1114 can be formed on or in a first substrate 1110, andcorresponding recesses 1134 can be formed on or in a second substrate1130. The penetrating structures 1114 can be formed from a conductivematerial in a particular embodiment, but in other embodiments, need notbe formed from a conductive material and can instead be formed fromother materials, including the first substrate material 1113. In any ofthese embodiments, the penetrating structures 1114 can have an outersurface that is conductive. For example, a first seed layer 1182 a canbe disposed over the penetrating structures 1114 and the adjacentsurfaces of the first substrate 1110. A first mask 1120 a can then beselectively disposed (or disposed and selectively removed) on the firstsubstrate 1110 to cover the first seed layer 1182 a in regions adjacentto the penetrating structure 1114, and leave the first seed layer 1182 aexposed at the penetrating structures 1114.

The second substrate 1130 can receive a second seed layer 1182 b that isdisposed in the recesses 1134 and the adjacent portions of the secondsubstrate 1130. A second mask 1120 b can be disposed on the portions ofthe second seed layer 1182 b positioned outside the recesses 1134. Thefirst substrate 1110 and the second substrate 1130 are then movedrelative to each other as indicated by arrows A so that the penetratingstructures 1114 enter the recesses 1134.

FIG. 11B illustrates the first substrate 1110 and the second substrate1130 after they have been moved relative to each other such that thepenetrating structures 1114 enter the corresponding recesses 1134. Whilethere may be incidental contact between the penetrating structures 1114and the walls of the corresponding recesses 1134, the penetratingstructures 1114 and recesses 1134 are generally not mechanicallyinterlocked with each other. Accordingly, it is expected that the force(if any) required to move the substrates 1110, 1130 into the positionshown in FIG. 11B is small or non-existent.

As shown in FIG. 11B, the first substrate 1110 and the second substrate1130 can be separated by a gap 1181. The two substrates 1110, 1130 canthen be subjected to an electroless, electrolytic, and/or other processin which a conductive material 1183 is disposed in the gap 1181. Theconductive material 1183 forms a physical and electrical bond betweenthe first seed layer 1182 a carried by the first substrate 1110, and thesecond seed layer 1182 b carried by the second substrate 1130. Theregions between the neighboring recesses 1134 and between theneighboring penetrating structures 1114 are protected from theconductive material 1183 by the second mask 1120 b and the first mask1120 a, respectively.

After the conductive material 1183 is disposed between the penetratingstructures 1114 and the corresponding recesses 1134, the first andsecond masks 1120 a, 1120 b are removed. The portions of the first andsecond seed layers 1182 a, 1182 b positioned away from the penetratingstructures 1114 and the recesses 1134 are then also removed, producingthe structure shown schematically in FIG. 11C. At this point, as aresult of the foregoing material removal processes, the assembly caninclude interstices 1184 at positions located outwardly from the bondsformed between the penetrating structures 1114 and the correspondingrecesses 1134. These interstices 1184 can optionally be filled with afill material, e.g., an underfill material or another suitabledielectric material. In another embodiment, these interstices 1184 canbe left open, and in a particular arrangement, the interstices 1184 canform, in whole or in part, cooling channels that allow the first andsecond substrates 1110, 1113 to be convectively cooled. For example, theinterface between the substrates 1110, 1113 can be cooled with a flow ofair, de-ionized water, or fluoroinert.

In a particular embodiment of the foregoing processes, the firstsubstrate 1110 is positioned above the second substrate 1130, so thatthe recesses 1134 open in an upward direction. It is expected that thisarrangement will reduce the likelihood for gases to collect in therecesses 1134 during processing. While the penetrating structures 1114are shown in FIGS. 11A-11C as simple columnar structures, in otherembodiments, they can have other shapes, including any of the foregoingshapes described above. Such shapes can provide additional surface areabeyond that provided by the simple columnar structures shown in FIGS.11A-11C and can accordingly increase the strength, robustness, and/orreliability of the resulting physical and electrical bonds.

Other features of the foregoing embodiments may also be combined withthe arrangement shown in FIGS. 11A-11C. For example, in someembodiments, structures generally similar to those described above withreference to FIGS. 2-10C, in which a mechanical interlock is formed uponthe entry of the penetrating structures into the corresponding recesses,can be used at selective locations between the first and secondsubstrates 1110, 1130 shown in FIGS. 11A-11C. This arrangement can beused to maintain a consistent gap 1181 at the interface between thefirst and second substrates 1110, 1130, and can support the twosubstrates in a fixed position relative to each other while they undergothe processing steps described above with reference to FIGS. 11B-11C. Inany of these embodiments, it is expected that the force required toengage the two substrates 1110, 1130 with each other for the purpose ofproviding a physical and/or electrical connection between the twosubstrates, can be significantly reduced when compared with existingmethods for connecting semiconductors substrates.

Any of the semiconductor packages resulting from joining thesemiconductor substrates in accordance with the methods and structuresdescribed above with reference to FIGS. 1A-11C can be incorporated intoa myriad of larger and/or more complex systems, a representative exampleof which is a system 1200 shown schematically in FIG. 12. The system1200 can include a processor 1202, a memory 1204 (e.g., SRAM, DRAM,Flash memory and/or other memory device), input/output devices 1206(e.g., a sensor and/or transmitter), and/or other subsystems orcomponents 1208. Semiconductor packages having any one or a combinationof the features described above with reference to FIGS. 1-11C may beincluded in any of the devices shown in FIG. 12. The resulting system1200 can perform any of a wide variety of computing, processing,storage, sensing, imaging, and/or other functions. Accordingly, therepresentative system 1200 includes without limitation, computers and/orother data processors, for example, desktop computers, laptop computers,internet appliances, hand-held devices (e.g., palm-top computers,wearable computers, cellular or mobile phones, personal digitalassistants, music players, cameras, etc.), multi-processor systems,processor-based or programmable consumer electronics, network computersand mini-computers. Other representative systems 1200 may be housed in asingle unit or distributed over multiple interconnected units (e.g.,through a communication network). The components of the system 1200 canaccordingly include local and/or remote memory storage devices, and anyof a wide variety of computer-readable media.

From the foregoing, it will be appreciated that specific embodimentshave been described herein for purposes of illustration, but that theforegoing systems and methods may have other embodiments as well. Forexample, while certain of the embodiments described above were describedin the context of semiconductor packages having two or three stackeddies, in other embodiments, the packages can include other numbers ofstacked dies. Many of the processes for forming the foregoing connectingstructures and connecting the mating structures of differentsemiconductor substrates can be carried out of the die level (e.g.,after singulating the dies), the wafer level (e.g., before singulatingthe dies) and/or at other processing stages. Accordingly, the bondingprocesses may be used to bond an individual die to another individualdie, or to bond an individual die to a wafer or portion of a wafer, orto bond a wafer or portion of a wafer to another wafer or portion of awafer. The wafer or wafer portion (e.g., wafer form) can include anunsingulated wafer or wafer portion, or a repopulated carrier wafer. Therepopulated carrier wafer can include an adhesive material (e.g., aflexible adhesive) surrounded by a generally rigid frame having aperimeter shape comparable to that of an unsingulated wafer, withsingulated elements (e.g., die) carried by the adhesive.

In some case, conductive materials may be applied in bulk directly on adielectric barrier layer (e.g., via a direct on-barrier plating process)and in other embodiments, a conductive seed layer may first be appliedto the dielectric barrier layer. The recesses and penetrating structurescan have different sizes and/or shapes than those shown in the Figures,and the sizes/shapes of the recesses and corresponding penetratingstructures can be tailored to be suitable/compatible with each other.The penetrating structures can contact material in the correspondingrecess as they enter the recess or, as shown in FIGS. 11A-11C, thepenetrating structures can penetrate (e.g., enter) the recesses withlittle or no contact with the recess walls, and a bond or a strongerbond can be formed between the penetrating structures and the recessesafter penetration.

Certain features described in the context of particular embodiments maybe combined or eliminated in other embodiments. For example, thestructure shown in FIGS. 6B or 8B can be combined with the triangularstructure shown in FIGS. 5D or 2. The support member 101 shown in FIG. 1can be eliminated in some embodiments. Further, while features andresults associated with certain embodiments have been described in thecontext of those embodiments, other embodiments may also exhibit suchfeatures and results, and not all embodiments need necessarily exhibitsuch features and results. Accordingly, the disclosure can include otherembodiments not shown or described above.

We claim:
 1. A semiconductor system, comprising: a semiconductorsubstrate material having a through-substrate via extending along a viaaxis; a conductive material disposed in the via; and a penetratingstructure aligned along the via axis and extending away from the via,the penetrating structure having an external surface, with a contour ofthe external surface varying spatially in a non-monotonic manner.
 2. Thesemiconductor system of claim 1 wherein the external surface has agenerally arrowhead-type shape.
 3. The semiconductor system of claim 1wherein the external surface includes multiple dendritic structuresextending away from the via.
 4. The semiconductor system of claim 1wherein a side portion of the external surface includes a plurality ofprotrusions and recesses extending in a direction generally transverseto a major axis of the via.
 5. The semiconductor system of claim 1wherein an end portion of the external surface includes a plurality ofprotrusions and recesses extending in a direction generally aligned withthe via axis.
 6. The semiconductor system of claim 1 wherein thesubstrate material is the first of two substrate materials, and whereinthe system further comprises a second substrate material having a recesswith a conductive inner surface, and wherein the penetrating structureof the first substrate material is received in the recess of the secondsubstrate material, and is in mechanical and electrical contact with theinner surface of the recess.
 7. The semiconductor system of claim 1wherein the penetrating structure is one of multiple penetratingstructures carried by the semiconductor substrate, and wherein a pitchbetween neighboring penetrating structures is less than 50 microns, anda lateral dimension of individual penetrating structures is less than 20microns.
 8. The semiconductor system of claim 1 wherein the penetratingstructure includes a tin coating on an underlying metal structure thatincludes a metal other than tin.
 9. A semiconductor system, comprising:a first semiconductor substrate; a penetrating structure carried by thefirst semiconductor substrate, wherein the penetrating structure is madefrom a first conductive material and has an external surface that variesin a non-monochromatic manner; a second semiconductor substrate having avia extending along a via axis; and a second conductive materialdisposed in the via and having a preformed recess positioned along thevia axis, wherein the second conductive material has a non-uniformthickness in the recess, and wherein the penetrating structure isconfigured to be received in the recess.
 10. The semiconductor system ofclaim 9 wherein the penetrating structure has a generally arrowhead-typecross-sectional shape.
 11. The semiconductor system of claim 9 whereinthe external surface of the penetrating structure includes a pluralityof dendritic structures and/or indentations.
 12. The semiconductorsystem of claim 9 wherein the second conductive material is a firstdistance from the via axis at a first position in the recess and asecond distance larger than the first distance from the via axis at asecond position in the recess, wherein the second position is deeper inthe recess than the first position.
 13. The semiconductor system ofclaim 9 wherein the second conductive material is configured to bedeformed by the penetrating structure when the penetrating structure isreceived in the recess.
 14. The semiconductor system of claim 9 whereinthe penetrating structure is in mechanical and electrical contact withthe second conductive material when the penetrating structure isreceived in the recess.
 15. A semiconductor system, comprising: asemiconductor substrate material having a via extending along a viaaxis, wherein the via has a via wall and a cross-sectional dimension; aconductive material disposed on the via wall, wherein the conductivematerial has a thickness that varies across the cross-sectionaldimension of the via; and a penetrating structure aligned along the viaaxis and extending away from the via, the penetrating structure havingan external surface that varies spatially in a non-monotonic manneralong a periphery of the penetrating structure.
 16. The semiconductorsystem of claim 15 wherein the semiconductor substrate is a firstsemiconductor substrate, and wherein the semiconductor system furthercomprises a second semiconductor substrate material having a conductivereceptacle, the penetrating structure being received in the conductivereceptacle, and the conductive receptacle being deformed by thepenetrating structure.
 17. The semiconductor system of claim 15 whereinthe conductive material has an increasing thickness in a directiontoward an open end of the via.-
 18. The semiconductor system of claim 15wherein the conductive material defines opposing lobes extendinginwardly away from the via wall at an open end of the via.
 19. Thesemiconductor system of claim 18 wherein the opposing lobes do notcontact each other in the via.
 20. The semiconductor system of claim 18wherein the opposing lobes contact each other in the via.